Data transformation in SPC for semiconductor machinery control: A case of monitoring particles (Q3369499)
From MaRDI portal
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Data transformation in SPC for semiconductor machinery control: A case of monitoring particles |
scientific article |
Statements
Data transformation in SPC for semiconductor machinery control: A case of monitoring particles (English)
0 references
2 February 2006
0 references
machinery control
0 references
semiconductor manufacturing
0 references
control chart
0 references
particle counts
0 references
