Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times (Q337294)
From MaRDI portal
 | This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use this page instead for the normal view: Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times |
scientific article; zbMATH DE number 6650779
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times |
scientific article; zbMATH DE number 6650779 |
Statements
Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times (English)
0 references
10 November 2016
0 references
scheduling
0 references
cluster tools
0 references
semiconductor manufacturing
0 references
Petri net
0 references
0 references
