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Robust <scp>H</scp><sup>∞</sup> Control in Fast Atomic Force Microscopy - MaRDI portal

Robust <scp>H</scp><sup>∞</sup> Control in Fast Atomic Force Microscopy (Q3454350)

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Robust <scp>H</scp><sup>∞</sup> Control in Fast Atomic Force Microscopy
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    Robust <scp>H</scp><sup>∞</sup> Control in Fast Atomic Force Microscopy (English)
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    24 November 2015
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    atomic force microscopy
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    piezoelectric actuator
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    nano-positioning
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    hysteresis
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    nonlinear systems
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    charge-control
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    \(H^{\infty}\) control
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    robust control
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