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Q3456224 - MaRDI portal

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    Statements

    author
    Ioslovich, Ilya
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    Gutman, Per-Olof
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    publication date
    11 December 2015
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    zbMATH Keywords
    optimal control
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    minimum-time problem
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    Pontryagin maximum principle
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    wafer stage positioning
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    chip manufacturing
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    Identifiers

    Mathematics Subject Classification ID
    49N90
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    49K15
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    90B30
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    zbMATH DE Number
    6520439
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