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Dry stiction of micro structures—theory and experiment - MaRDI portal

Dry stiction of micro structures—theory and experiment (Q3503273)

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Dry stiction of micro structures—theory and experiment
scientific article

    Statements

    title
    Dry stiction of micro structures—theory and experiment (English)
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    author
    Mark Meinhart
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    Norman L. Miller
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    M. Taher A. Saif
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    publication date
    22 May 2008
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    zbMATH Keywords
    stiction
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    MEMS
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    reactive ion etching
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    drag
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    capillarity
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    cites work
    Q4133280
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    Q4851739
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    Identifiers

    zbMATH DE Number
    5278017
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    OpenAlex ID
    W2072049787
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