Atomistic analysis of B clustering and mobility degradation in highly B‐doped junctions (Q3585572)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Atomistic analysis of B clustering and mobility degradation in highly B‐doped junctions |
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Atomistic analysis of B clustering and mobility degradation in highly B‐doped junctions (English)
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20 August 2010
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electronic devices
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process simulation
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dopants
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defects
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diffusion
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electrical activation
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sheet resistance
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mobility
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