On the Partial Differential Equations of Electrostatic MEMS Devices: Stationary Case (Q3593046)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | On the Partial Differential Equations of Electrostatic MEMS Devices: Stationary Case |
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On the Partial Differential Equations of Electrostatic MEMS Devices: Stationary Case (English)
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24 September 2007
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MEMS
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pull-in voltage
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power law permittivity profile
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minimal solutions
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