Numerical Simulation of Thermal Oxidation Process in Semiconductor Devices Using Mixed—Hybrid Finite Elements (Q3654828)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Numerical Simulation of Thermal Oxidation Process in Semiconductor Devices Using Mixed—Hybrid Finite Elements |
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Numerical Simulation of Thermal Oxidation Process in Semiconductor Devices Using Mixed—Hybrid Finite Elements (English)
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11 January 2010
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semiconductor device
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reaction-diffusion equation
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mixed-hybrid finite elements
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oxidation simulation
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Stokes flow
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elasticity
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