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Optimum Scan-Width Selection Under Containment Constraints - MaRDI portal

Optimum Scan-Width Selection Under Containment Constraints (Q3703813)

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Optimum Scan-Width Selection Under Containment Constraints
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    Optimum Scan-Width Selection Under Containment Constraints (English)
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    1984
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    circuit layout
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    beam widths
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    electron exposure of integrated circuit wafers
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    cost function
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    optimal solution
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    dynamic programming
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    efficient algorithms
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    data structures
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