TWO‐DIMENSIONAL PROCESS SIMULATION USING A QUADRATIC FINITE ELEMENT DISCRETIZATION (Q3756467)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | TWO‐DIMENSIONAL PROCESS SIMULATION USING A QUADRATIC FINITE ELEMENT DISCRETIZATION |
scientific article |
Statements
TWO‐DIMENSIONAL PROCESS SIMULATION USING A QUADRATIC FINITE ELEMENT DISCRETIZATION (English)
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1984
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semiconductor device simulation
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mesh refinement
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finite element method
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non-linear diffusion equation
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self-induced electric field
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charged vacancies effects
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evaporation
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segregation
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oxidation growth
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incomplete implicit scheme
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0.85495937
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0.8412002
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0.83872163
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0.8383355
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0.83776695
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0.8375679
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