The Isolation Oxidation of Silicon: The Reaction-Controlled Case (Q3826286)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | The Isolation Oxidation of Silicon: The Reaction-Controlled Case |
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The Isolation Oxidation of Silicon: The Reaction-Controlled Case (English)
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1989
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asymptotic expansions
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two-dimensional isolation oxidation of silicon
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limit of reaction-controlled oxidation
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nondimensional reaction coefficient
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