Mechanical and control characteristics of multilayered piezodrives of nano- and micrometric movements for parallel and coded control (Q384676)
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scientific article; zbMATH DE number 6234220
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Mechanical and control characteristics of multilayered piezodrives of nano- and micrometric movements for parallel and coded control |
scientific article; zbMATH DE number 6234220 |
Statements
Mechanical and control characteristics of multilayered piezodrives of nano- and micrometric movements for parallel and coded control (English)
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28 November 2013
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piezodrives of nano- and micrometric movements
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precision spatial positioning
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0.89751077
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0.8677486
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0.8529202
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0.8420006
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0.8411057
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0.83969665
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