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Q4023732 - MaRDI portal

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scientific article
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scientific article

    Statements

    author
    Wilhelm Merz
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    publication date
    23 January 1993
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    zbMATH Keywords
    thermal oxidation of silicon
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    existence
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    uniqueness
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    numerical treatment
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    triangular elements
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    Identifiers

    Mathematics Subject Classification ID
    35K57
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    35Q80
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    65M99
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    65N99
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    zbMATH DE Number
    108274
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