A spatial rule adaptation procedure for reliable production control in a wafer fabrication system (Q4245586)
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scientific article; zbMATH DE number 1297299
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A spatial rule adaptation procedure for reliable production control in a wafer fabrication system |
scientific article; zbMATH DE number 1297299 |
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A spatial rule adaptation procedure for reliable production control in a wafer fabrication system (English)
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10 July 2000
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reliable dispatching rule
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Taguchi experimental design
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scheduling
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semiconductor wafer fabrication system
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