Reconstruction of Semiconductor Doping Profile from Laser-Beam-Induced Current Image (Q4310866)
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scientific article; zbMATH DE number 681327
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Reconstruction of Semiconductor Doping Profile from Laser-Beam-Induced Current Image |
scientific article; zbMATH DE number 681327 |
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Reconstruction of Semiconductor Doping Profile from Laser-Beam-Induced Current Image (English)
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5 March 1995
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reconstruction of a semiconductor doping profile
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laser-beam-induced current
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algorithm
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least squares formulation
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