High Concentration Arsenic Diffusion in Crystalline Silicon: An Asymptotic Analysis (Q4321950)
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scientific article; zbMATH DE number 719942
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | High Concentration Arsenic Diffusion in Crystalline Silicon: An Asymptotic Analysis |
scientific article; zbMATH DE number 719942 |
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High Concentration Arsenic Diffusion in Crystalline Silicon: An Asymptotic Analysis (English)
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7 February 1995
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asymptotic analysis
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diffusion of arsenic
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constant surface concentration
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