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Q4348689 - MaRDI portal

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scientific article; zbMATH DE number 1050462
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English
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scientific article; zbMATH DE number 1050462

    Statements

    publication date
    20 August 1997
    0 references
    zbMATH Keywords
    impurity diffusion
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    microelectronics devices
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    generalized Stefan problem
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    Identifiers

    zbMATH DE Number
    1050462
    0 references
     
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