Fast movement strategies for a step‐and‐scan wafer stepper (Q4354869)
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scientific article; zbMATH DE number 1062251
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Fast movement strategies for a step‐and‐scan wafer stepper |
scientific article; zbMATH DE number 1062251 |
Statements
Fast movement strategies for a step‐and‐scan wafer stepper (English)
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25 November 1997
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determination of fast movement strategies
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integrated circuits
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generalized asymmetric traveling salesman
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simulated annealing
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