Monitoring Wafer Map Data from Integrated Circuit Fabrication Processes for Spatially Clustered Defects (Q4355444)
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scientific article; zbMATH DE number 1063734
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Monitoring Wafer Map Data from Integrated Circuit Fabrication Processes for Spatially Clustered Defects |
scientific article; zbMATH DE number 1063734 |
Statements
25 June 1998
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integrated circuit fabrication
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join-count statistic
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Markov random field
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quality improvement
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spatial randomness
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statistical process control
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wafer yield
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spatial clustering
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Monitoring Wafer Map Data from Integrated Circuit Fabrication Processes for Spatially Clustered Defects (English)
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