Subsonic gas flow in a straight and uniform microchannel (Q4409251)
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scientific article; zbMATH DE number 1942653
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Subsonic gas flow in a straight and uniform microchannel |
scientific article; zbMATH DE number 1942653 |
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Subsonic gas flow in a straight and uniform microchannel (English)
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2002
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microsystem fabrication
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packaging
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argon
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nitrogen
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helium
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