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Q4446094 - MaRDI portal

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scientific article; zbMATH DE number 2031606
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English
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scientific article; zbMATH DE number 2031606

    Statements

    author
    A. I. Chulichkov
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    Eugene A. Grachev
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    D. M. Ustinin
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    publication date
    25 January 2004
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    zbMATH Keywords
    micro-engineering
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    electron scattering
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    electron microscopy
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    nano-engineering
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    electron beam lithography
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    Identifiers

    zbMATH DE Number
    2031606
    0 references
     
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