Single dopant diffusion in semiconductor technology (Q4452302)
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scientific article; zbMATH DE number 2041205
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Single dopant diffusion in semiconductor technology |
scientific article; zbMATH DE number 2041205 |
Statements
Single dopant diffusion in semiconductor technology (English)
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12 February 2004
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nonlinear reaction-drift-diffusion equations
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mobile point defects
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dopant-defect pairs
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solvability
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