Modelling of semiconductor wafer fabrication systems by extended object-oriented Petri nets (Q4671391)
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scientific article; zbMATH DE number 2161467
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Modelling of semiconductor wafer fabrication systems by extended object-oriented Petri nets |
scientific article; zbMATH DE number 2161467 |
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Modelling of semiconductor wafer fabrication systems by extended object-oriented Petri nets (English)
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26 April 2005
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