Free-molecular gas flow through an oscillating membrane (Q477234)
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scientific article; zbMATH DE number 6376208
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Free-molecular gas flow through an oscillating membrane |
scientific article; zbMATH DE number 6376208 |
Statements
Free-molecular gas flow through an oscillating membrane (English)
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2 December 2014
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membrane
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gas separation
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high-frequency oscillations
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microelectromechanical systems
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free-molecular flow
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