A cellular automaton methodology for the simulation of integrated circuit fabrication processes (Q4788304)
From MaRDI portal
scientific article; zbMATH DE number 1856271
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A cellular automaton methodology for the simulation of integrated circuit fabrication processes |
scientific article; zbMATH DE number 1856271 |
Statements
A cellular automaton methodology for the simulation of integrated circuit fabrication processes (English)
0 references
21 January 2003
0 references
Cellular automata
0 references
Simulation
0 references
Modelling
0 references
