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Q4850472 - MaRDI portal

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scientific article; zbMATH DE number 806621
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English
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scientific article; zbMATH DE number 806621

    Statements

    author
    Ivan G. Götz
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    Wilhelm Merz
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    K. Pulverer
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    Zhang, Jianhua
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    publication date
    18 March 1996
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    zbMATH Keywords
    oxidation process of silicon
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    Identifiers

    Mathematics Subject Classification ID
    35A07
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    35R35
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    35Q30
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    zbMATH DE Number
    806621
    0 references
     
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