Self-similar solutions for a free boundary problem in the doping of semiconductors (Q4867407)
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scientific article; zbMATH DE number 850776
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Self-similar solutions for a free boundary problem in the doping of semiconductors |
scientific article; zbMATH DE number 850776 |
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Self-similar solutions for a free boundary problem in the doping of semiconductors (English)
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12 August 1996
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implant problem
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diffusion model
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evolution of the concentration profiles of the impurities
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