A hybrid finite element‐finite difference method for thermal analysis in X‐ray lithography (Q4952969)
From MaRDI portal
scientific article; zbMATH DE number 1443361
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A hybrid finite element‐finite difference method for thermal analysis in X‐ray lithography |
scientific article; zbMATH DE number 1443361 |
Statements
A hybrid finite element‐finite difference method for thermal analysis in X‐ray lithography (English)
0 references
29 January 2001
0 references
\(X\)-ray lithography
0 references
three-dimensional numerical method
0 references
temperature profile
0 references
\(X\)-ray irradiation process
0 references
hybrid finite element-finite difference scheme
0 references
three-dimensional parabolic equations
0 references
thin layers
0 references
domain decomposition algorithm
0 references
parallel Gaussian elimination
0 references
block tridiagonal linear systems
0 references
