Control of MEMS Vibration Modes With Pulsed Digital Oscillators: Part I—Theory (Q5011001)

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scientific article; zbMATH DE number 7386822
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Control of MEMS Vibration Modes With Pulsed Digital Oscillators: Part I—Theory
scientific article; zbMATH DE number 7386822

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    Control of MEMS Vibration Modes With Pulsed Digital Oscillators: Part I—Theory (English)
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    26 August 2021
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