Identification of MEMS Gyroscope Structure Using Frequency Response Data (Q5054396)
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scientific article; zbMATH DE number 7624947
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Identification of MEMS Gyroscope Structure Using Frequency Response Data |
scientific article; zbMATH DE number 7624947 |
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Identification of MEMS Gyroscope Structure Using Frequency Response Data (English)
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29 November 2022
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system identification
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MEMS gyroscope
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frequency response
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lumped parameter mechanical model
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