Mathematical Modeling and Simulation of Thermal Effects in Flexural Microcantilever Resonator Dynamics (Q5188370)
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scientific article; zbMATH DE number 5679895
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Mathematical Modeling and Simulation of Thermal Effects in Flexural Microcantilever Resonator Dynamics |
scientific article; zbMATH DE number 5679895 |
Statements
Mathematical Modeling and Simulation of Thermal Effects in Flexural Microcantilever Resonator Dynamics (English)
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10 March 2010
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thermal damping
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microelectromechanical systems simulation
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microelectromechanical systems dynamics
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microbeam
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microresonator
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mathematical modeling
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