Approximation of Hopkins equation in Hilbert space and its application in polarized illumination modelling (Q5190735)
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scientific article; zbMATH DE number 5587229
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Approximation of Hopkins equation in Hilbert space and its application in polarized illumination modelling |
scientific article; zbMATH DE number 5587229 |
Statements
Approximation of Hopkins equation in Hilbert space and its application in polarized illumination modelling (English)
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27 July 2009
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Hopkins integral equation
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Hermitian integral kernel
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polarized illumination source
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Hilbert-Schmidt kernel
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numerical example
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optical exposure system
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micro optical lithography
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