Virtual Sensors for Semiconductor Manufacturing: A Nonparametric Approach - Exploiting Information Theoretic Learning and Kernel Machines (Q5245446)
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scientific article; zbMATH DE number 6423487
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Virtual Sensors for Semiconductor Manufacturing: A Nonparametric Approach - Exploiting Information Theoretic Learning and Kernel Machines |
scientific article; zbMATH DE number 6423487 |
Statements
Virtual Sensors for Semiconductor Manufacturing: A Nonparametric Approach - Exploiting Information Theoretic Learning and Kernel Machines (English)
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8 April 2015
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semiconductors
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machine learning
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entropy
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kernel methods
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