Eigenfrequencies and quality factors of nanofilm resonators with dissipative surface stress effects (Q526570)
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scientific article; zbMATH DE number 6715359
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Eigenfrequencies and quality factors of nanofilm resonators with dissipative surface stress effects |
scientific article; zbMATH DE number 6715359 |
Statements
Eigenfrequencies and quality factors of nanofilm resonators with dissipative surface stress effects (English)
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15 May 2017
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NEMS/MEMS
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nanoplates
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free oscillations
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\(Q\)-factor
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surface dissipation
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