Heat transfer in vacuum packaged microelectromechanical system devices (Q5303746)
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scientific article; zbMATH DE number 5683622
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Heat transfer in vacuum packaged microelectromechanical system devices |
scientific article; zbMATH DE number 5683622 |
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Heat transfer in vacuum packaged microelectromechanical system devices (English)
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18 March 2010
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heat transfer
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micromechanical devices
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thermal management (packaging)
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