Gradient-Based Source and Mask Optimization in Optical Lithography (Q5370244)
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scientific article; zbMATH DE number 6793640
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Gradient-Based Source and Mask Optimization in Optical Lithography |
scientific article; zbMATH DE number 6793640 |
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Gradient-Based Source and Mask Optimization in Optical Lithography (English)
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19 October 2017
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