Analysis of the Effect of Spatial Uncertainties on the Dynamic Behavior of Electrostatic Microactuators (Q5372534)

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scientific article; zbMATH DE number 6799683
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Analysis of the Effect of Spatial Uncertainties on the Dynamic Behavior of Electrostatic Microactuators
scientific article; zbMATH DE number 6799683

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    Analysis of the Effect of Spatial Uncertainties on the Dynamic Behavior of Electrostatic Microactuators (English)
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    27 October 2017
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