A practical fab design procedure for wafer fabrication plants (Q5385496)
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scientific article; zbMATH DE number 5271456
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A practical fab design procedure for wafer fabrication plants |
scientific article; zbMATH DE number 5271456 |
Statements
A practical fab design procedure for wafer fabrication plants (English)
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6 May 2008
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facility layout
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semiconductor manufacture
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facility planning
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facility design
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