On the evaluation of damping in MEMS in the slip-flow regime (Q5435373)
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scientific article; zbMATH DE number 5225925
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | On the evaluation of damping in MEMS in the slip-flow regime |
scientific article; zbMATH DE number 5225925 |
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On the evaluation of damping in MEMS in the slip-flow regime (English)
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14 January 2008
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fast multipole boundary element method
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biaxial accelerometer
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