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Q5437757 - MaRDI portal

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scientific article; zbMATH DE number 5230323
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English
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scientific article; zbMATH DE number 5230323

    Statements

    author
    Agneta M. Balint
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    Robert M. Szabo
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    László Nánai
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    St. Iovan
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    Stefan Balint
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    publication date
    28 January 2008
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    zbMATH Keywords
    Deal-Grove differential equation
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    growth mechanism
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    thermal oxidation model
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    silicon oxid
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    crystallographic orientation
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    Identifiers

    zbMATH DE Number
    5230323
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