Scheduling a wet station for wafer cleaning with multiple job flows and multiple wafer-handling robots (Q5438627)
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scientific article; zbMATH DE number 5229819
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Scheduling a wet station for wafer cleaning with multiple job flows and multiple wafer-handling robots |
scientific article; zbMATH DE number 5229819 |
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Scheduling a wet station for wafer cleaning with multiple job flows and multiple wafer-handling robots (English)
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24 January 2008
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wet station
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semiconductor manufacturing
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handling robots
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scheduling
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Petri nets
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