Constructing the OGE for promoting tool group productivity in semiconductor manufacturing (Q5438628)
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scientific article; zbMATH DE number 5229820
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Constructing the OGE for promoting tool group productivity in semiconductor manufacturing |
scientific article; zbMATH DE number 5229820 |
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Constructing the OGE for promoting tool group productivity in semiconductor manufacturing (English)
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24 January 2008
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overall equipment efficiency
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tool productivity
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tool group
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semiconductor manufacturing
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