Validation and evaluation for defect-kill-rate and yield estimation models in semiconductor manufacturing (Q5444464)
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scientific article; zbMATH DE number 5240581
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Validation and evaluation for defect-kill-rate and yield estimation models in semiconductor manufacturing |
scientific article; zbMATH DE number 5240581 |
Statements
Validation and evaluation for defect-kill-rate and yield estimation models in semiconductor manufacturing (English)
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25 February 2008
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kill rate of visual defect
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yield estimation
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semiconductor manufacturing
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Taguchi's SN ratio
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