A nonlinear model predictive control approach for robust end‐point property control of a thin‐film deposition process (Q5449741)
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scientific article; zbMATH DE number 5250652
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A nonlinear model predictive control approach for robust end‐point property control of a thin‐film deposition process |
scientific article; zbMATH DE number 5250652 |
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A nonlinear model predictive control approach for robust end‐point property control of a thin‐film deposition process (English)
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18 March 2008
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nonlinear model predictive control
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thin-film deposition
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receding horizon control
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