Touchdown and Pull-In Voltage Behavior of a MEMS Device with Varying Dielectric Properties (Q5470266)
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scientific article; zbMATH DE number 5029041
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Touchdown and Pull-In Voltage Behavior of a MEMS Device with Varying Dielectric Properties |
scientific article; zbMATH DE number 5029041 |
Statements
Touchdown and Pull-In Voltage Behavior of a MEMS Device with Varying Dielectric Properties (English)
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30 May 2006
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quenching
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pull-in voltage
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saddle-node
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MEMS
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dielectric permittivity
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dielectric elastic membrane
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rigid conducting ground plate
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