Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities. (Q5925913)
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scientific article; zbMATH DE number 1574254
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities. |
scientific article; zbMATH DE number 1574254 |
Statements
Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities. (English)
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2000
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End point control
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Factory automation
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Microelectronics manufacturing
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Predictive control
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Process control
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Quality control
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Sensors
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Temperature control
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