Automated inspection of IC wafer contamination (Q5950299)
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scientific article; zbMATH DE number 1680340
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Automated inspection of IC wafer contamination |
scientific article; zbMATH DE number 1680340 |
Statements
Automated inspection of IC wafer contamination (English)
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14 May 2002
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IC wafer inspection
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contamination classification
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neural networks
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