Three-dimensional magnetic field analyses on the magnetron sputtering system by using Free Mesh Method (Q5956365)
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scientific article; zbMATH DE number 1709092
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Three-dimensional magnetic field analyses on the magnetron sputtering system by using Free Mesh Method |
scientific article; zbMATH DE number 1709092 |
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Three-dimensional magnetic field analyses on the magnetron sputtering system by using Free Mesh Method (English)
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24 July 2002
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mesh method
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finite element method
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magnetic field analysis
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magnetron sputtering system
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