Recent advances in models for thermal oxidation of silicon (Q5956645)
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scientific article; zbMATH DE number 1713139
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Recent advances in models for thermal oxidation of silicon |
scientific article; zbMATH DE number 1713139 |
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Recent advances in models for thermal oxidation of silicon (English)
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28 February 2002
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diffusion
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level-set methods
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continuum mechanics of solids
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thermodynamics of solids
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finite elements
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