3-D finite element simulation of wafer thermal distortion and stress fields in exposure process (Q5956667)
From MaRDI portal
scientific article; zbMATH DE number 1713161
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | 3-D finite element simulation of wafer thermal distortion and stress fields in exposure process |
scientific article; zbMATH DE number 1713161 |
Statements
3-D finite element simulation of wafer thermal distortion and stress fields in exposure process (English)
0 references
22 July 2002
0 references
Exposure
0 references
Finite element method
0 references
Wafer
0 references
Thermal deformation
0 references
Thermal stress
0 references
